Dedicated to Providing Fabrication Solutions

for the MEMS and Microelectronics Industry

200MM MEMS DEVICE FOUNDRY

Supporting our customers from early R&D to pilot production

WAFER SERVICES

Single step processing for the Microelectronics industry

DESIGNED TO HANDLE NONSTANDARD MATERIALS

Silicon, Quartz, Ceramic and Sapphire

 

Fabricating the Future

Founded in 2003, Rogue Valley Microdevices is the first company to establish a microelectronics manufacturing facility in beautiful Southern Oregon. Headquartered in Medford, Oregon, we have quickly established ourselves as one of the premier MEMS Companies in the United States. Our MEMS foundry & manufacturing facility contains processing equipment capable of volume manufacturing yet flexible enough to accommodate wafer sizes from 50mm to 300mm. We offer full Device Fabrication and Design services along with a variety of individual processes to support our growing network of satisfied customers. Our MEMS Foundry Capabilities include Metal Lift Off, Front to Back Alignment, Wet and Dry Etch, Low Stress LPCVD Nitride, LPCVD Undoped Polysilicon, PECVD Oxide, PECVD Carbon Doped Oxide, PECVD Nitride, Wet and Dry Thermal Oxidation, N2/H2 Annealing, and a variety of PVD and Electroplated Metal Films.

 
 

TargetedStressLpcvdNitride-001MEMS

With over 50 years combined experience in MEMS fabrication and MEMS design our engineering team can quickly develop a turn key process for your most innovative MEMS product line. Rogue Valley Microdevices maintains a wide selection of thin films along with fully developed MEMS process modules that enable full device fabrication to be performed in-house. Having the capability to offer a more complete solution helps increase productivity, and enhances communication between our engineering team and yours. This unique approach helps to reduce cost, shorten process lead-time and increase your bottom line. Read More.

StoichiometricLpcvdNitride-001Thin Films

Thin films are an important building block in any microelectronics manufacturing process. Having a diverse and flexible Thin Films tool box can greatly improve device function and manufacturability. For an Optical Device, multilayer film stacks with the right refractive index is extremely important, while the mechanical properties of a film can determine the viability of a MEMS device. For many biomedical devices, gold and silver layers are essential to the function of the device. Rogue Valley Microdevices maintains one the largest and most diverse thin films offerings commercially available. Read More.
 

PecvdNitride-002About

Rogue Valley Microdevices is dedicated to providing high quality manufacturing and engineering services of silicon wafers at an affordable price. We believe in our ability to meet or exceed our customers’ expectations of quality, price, and delivery. We supply services to customers with a wide variety of applications, including semiconductor, biotechnology, nanotechnology, and MEMS. Read More.