With a refractive index of over 3.8, silicon is widely used as an antireflective coating. Because of the films high refractive index, a thin layer of sputtered silicon will absorb rather than reflect light, helping to reduce pattern defects during photolithography. Our sputtered silicon can also prevent the oxidation of metals, like copper and aluminum, allowing you more process flexibility.
Our sputter process has been designed to deposit ultra-clean metal and dielectric films. An in-situ RF etch can be added to the process to insure good film adhesion and ohmic contact to underlying conductive layers.
Our most popular sputtered films include:
- Aluminum Alloys
- Silicon Nitride